 |
|
|
|
Scanning Spreading Resistance Microscopy (SSRM)
The
new SR
Module extends the universal
S.I.S. ULTRAObjective
and NANOStation
AFM/SPM systems by the Spreading Resistance and Conductivity Microscopy.
This contact method is able to map resistance and conductivity of your
conducting or semiconducting samples.
Now you can measure topography and simultaneously analyze the
properties of electronic devices or conducting polymers with nanometer
resolution. |
|
|
|
|
<<< |
|
|
|
Measurement
of conductivity in semiconducting material
  The
images show the
resistance signal from a GaAs sample in a 3D
representation. A doped and conducting
GaAs sub-layer is covered by an insulating surface layer. Two grooves
were etched through this layer
providing access to the doped sublayer.
On the surface no current could be detected. The left figure shows the
initial result with some conductivity
in the grooves.
After several scanning measurements in the longer groove another larger
scan was made, right figure.
The effect of a modified conductivity due to the SR measurement is
clearly visible.
The reason could be an induced
oxidization of the semiconductor. |
|
|
|
|
|
