 |
|
|
|
Scan
range:
|
20
µm x 20 µm x 3 µm,
40 µm x 40 µm x 4 µm,
80 µm x 80 µm x 5 µm,
hardware linearized scan motion in
x -y - direction ( z - direction optional )
|
|
|
Noise
level:
|
0.03
nm rms in vertical direction ( Z ) |
|
| Scan
speed: |
typ.
1 to 10 Hz |
|
| Detection
principle: |
fiber
optic interferometry |
|
| Tip
change: |
adjustment
free |
|
Digital
input/
output resolution: |
16
bit |
|
| Output
voltage: |
±
165 V, 2 µV rms |
|
| Input
channels: |
max.
8 simultaneous |
|
| External
output: |
max.
3 high speed with 16 bit resolution |
|
| Image
size : |
freely
selectable, from 128 to 4096 pixels,
even rectangular sizes |
|
| Processing: |
internal
32 bit DSP |
|
| Computer
interface: |
USB
(standard universal serial bus) |
|
| Operating
systems: |
Windows
98, ME, 2000, XP |
|
| |
|
|
| Measuring
modes |
Module
Requirement |
|
| Static
(contact): |
standard |
|
| Dynamic
(non contact): |
AC
- module |
|
| Phase
contrast: |
AC
- module |
|
| FM
Mode,
Q-Factor Control |
FM
Control module
|
|
| Field
contrast, MFM/EFM: |
AC-
module
with field contrast controller |
|
| Friction
and lateral force: |
LOC-
module
(longitudinal oscillation contrast) |
|
| Force/Amplitude
vs. distance: |
standard
/ AC-module with FD control |
|
| Force
modulation, elasticity: |
standard/AC-module
with variable force module
|
|
Surface
potential,
work function: |
AC
-
module with SSPM option |
|
| Spreading
resistance: |
standard
with SSRM option |
|
| Measurements
in liquids: |
ULTRAObjective®
LQ
|
|
