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• 16 bit digital/analog converter of all
channels (0.03 nm at 2 µm
Z-range, Z-range can be limited,
maintaining the full 16 bit resolution).
• Low voltage output of all important
signals can be measured at BNC connectors.
• Low voltage output of the gating signals
can be factory adjusted 0 V to 10 V or
-10 V to +10 V.
• Digital PI-controller for the
Z-direction.
• Digital PI-controller for the X- and
Y-linearization
(active linearization by path sensors).
• Modular concept of the electronic device
– therefore extensions are
easily possible.
• Non-contact module with amplitude and
phase detection.
• Interferometer module with temperature
stabilized semiconductor diode laser.
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