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Scan
range:
|
20 µm x
20 µm x 3
µm
40 µm x 40 µm x 4 µm
80 µm x 80 µm x 5 µm
hardware linearized scan
motion in X-Y-direction
(optional in Z-direction) |
|
Digital
input resolution: |
16 bit A/D |
|
|
Noise
level:
|
0.05 nm rms in
vertical direction (Z) |
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Digital
output resolution: |
16 bit D/A |
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| Lateral
accuracy: |
typically
within 1%, closed loop scanning |
|
Output
voltage: |
± 165 V,
mit 2 µV rms |
|
| Vertical
resolution: |
< 0.1 nm |
|
Input
channels: |
max. 8
simultaneous |
|
| Scan
speed: |
typ. 1 to 10 Hz |
|
Exteral
inputs: |
max. 3 high
speed
with 16 bit resolution |
|
| Detection
principle: |
fiber optic
interferometry, noise level
< 0.01 nm rms |
|
Image
size: |
freely
selectable,
from 128 to 1024 pixels, even rectangular sizes |
|
| Tips: |
silicon tips,
various types |
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Processing: |
internal 32 bit
DSP,
typ. 50 MHz |
|
| Tip
change: |
adjustment free |
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Computer
interface: |
USB (standard universal serial bus) |
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Operating
system: |
MS-Windows 2000® |
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