To localize and identify defects on hard disks, wafers and DVDs/CDs, samples are usually measured with optical inspection tools, marked, and then transferred to an AFM, often in a different lab and/or with a different user. With the NANOStation®HD, you can perform all of these steps with one single tool. Our system combines a high quality research microscope, a scriber, and our ULTRAObjective AFM on an automated platform.
The result? After locating a position on your sample, press one button to move the sample to the AFM and then begin your scan. After scanning, you can press another button to scribe the location on your sample.

The NANOStation®HD is available in two versions:
The R-θ version is for circular samples, like hard disks, and wafers.
The X-Y version is for rectangular samples, like masks, pole tips, and microchips.

X-Y Version		R-θ Version

 The system places a microscope, our AFM, and a scriber on one solid platform, which then utilizes precision translation and rotary stages to guarantee that AFM scans are centered precisely on your region of interest. The scriber allows you to mark the ROI for future reference.