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 | Air-Bearing
Stage System for
Ultra-High Precision Inspection
Sample
translation between the different measurement devices is achieved
without loss of productivity due to the high-speed, high precision
positioning capability of the system.
The seamless combination of different characterization tools on one
single platform makes the NANOStation® 300 the most cost
effective ultra-high precision system for large samples, like wafers,
masks, TFT displays, solar panels, and reticles.
Two features enhance your time to
result
extremely:
1) The optical sample inspection can be performed on the same platform
as the AFM measurement - therefore there is no need for transferring
your sample from machine to machine and/or from lab to lab.
2) The coordinate
transfer can be used to
investigate each imported position with the AFM. | |
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Highest Stability and
Precision
The translation stages work with a zero-friction air bearing system.
This allows fast, contactless, and wearless motion on an air cushion
with highest positioning accuracy. It also avoids drift issues which
are immanent with systems using spindles for stage translation.
Linear encoders read the stage position directly from phase gratings on
glass. This allows extremely precise stage positioning (1 micron
absolute positioning accuracy over 300 mm, 100 nm repeatability can be
achieved).
During AFM/SPM measurements, the granite sample stage rests firmly on
the granite foundation. |
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