 |
|
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|
|
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|
Scan
range:
|
20 µm x
20 µm x 3
µm
40 µm x 40 µm x 4 µm
80 µm x 80 µm x 5 µm
100 µm x 100 µm x 10 µm
200 µm x 200 µm x 10 µm
hardware linearized scan motion in X-Y-direction (optional in
Z-direction) |
|
Input
channels: |
max. 8
simultaneous |
|
|
Noise
level:
|
0,1 nm rms in
vertical direction (Z) |
|
External
inputs: |
max. 3 high
speed
with
16 bit resolution |
|
| Lateral
accuracy: |
typically
within 1%, closed loop scanning |
|
Image
size: |
Image size:
freely
selectable, from 128 to 1024 pixels, even rectangular sizes |
|
| Scan
speed: |
typ. 1 to 10 Hz |
|
Processing: |
internal 32 bit
DSP,
typ. 50 MHz |
|
| Detection
principle: |
fiber optical
interferometry, noise level
< 0,01 nm rms |
|
Computer
interface: |
USB (standard
universal serial bus) |
|
| Tips: |
silicon tips,
various types |
|
Operating
system: |
MS-Windows 2000® |
|
| Tip
change: |
adjustment free |
|
Microscope:
|
Zeiss Axiotech
optional with bright/dark field or differential interference contrast
(DIC) |
|
| Digital
input resolution: |
16 bit A/D |
|
Positioning:
|
manual
translation
stage 25 mm x 25 mm, other sizes available on request |
|
| Digital
output resolution: |
16 bit D/A |
|
Weight: |
approximate 50
kg |
|
| Output
voltage: |
± 165 V,
with 2 µV
rms |
|
Material:
|
granite |
|
