Providing AFM/SPM Resolution
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<<< Slightly misaligned oxidized Si 111 wafer:
The ultra-high stability is demonstrated by clearly imaging the surface. The terraces with a step height
of 0.3 nm are detected without filtering.
Image size is 5 µm x 5 µm,
Z-height is 2 nm |
Defect on Si-wafer >>>
Image size is 12 µm x 12 µm,
Z-height is 600 nm |
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<<< Topography of structured Si wafer.
Image size is 38 µm x 38 µm,
Z-height is 3000 nm
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| Optical image of TFT display, DIC contrast |
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AFM measurement on TFT display.
Image size is 200 µm x 150 µm
Z-height is 3000 nm |
