 |
|
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Scan
range:
|
80 µm x
80 µm x 5
µm
hardware linearized scan motion in X-Y-direction (optional in
Z-direction) |
|
Position
resolution translation stage: |
0.5 µm |
|
|
Noise
level:
|
< 0,1 nm rms
in vertical direction
(Z) |
|
Accuracy
of translation stage:
|
± 2
µm |
|
| Max. sample size: |
95 mm diameter (R-θ stage)
100 mm square (X-Y stage)
|
|
Deviation
between optical and AFM position:
|
< 2
µm |
|
| SPM
modes: |
all modes
applicable,
for a list click here
|
|
Scriber:
|
Diamond tip
with
sensor controlled load force |
|
| Tip
change: |
adjustment free |
|
Enclosure: |
Active
antivibration,
noise shield |
|
| Microscope: |
Zeiss Axiotech
optional with bright/dark field and differential interference contrast
(DIC) |
|
Operating
system: |
MS-Windows
2000®, XP, Vista
|
|
| Position
resolution
rotary
stage: |
10 mgrad |
|
Footprint: |
800 mm x 800 mm,
height 1800 mm |
|
Accuracy
of rotary stage: |
± 8
mgrad |
|
System
weight: |
approximate
250 kg |
|
